Title:
ELECTRON SCANNING MICROSCOPE
Document Type and Number:
Japanese Patent JP3966350
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electron scanning microscope, capable of forming a scanned image with high spatial resolution in the low accelerating voltage region.
SOLUTION: An accelerating tube 9 is arranged in an electron beam passage of an object lens 8 and rear stage accelerating voltage 10 of a primary electron beam is applied thereto. A superimposed voltage 13 is applied to a testpiece 12 to form a decelerating field for the primary electron beam between the accelerating tube 9 and the testpiece 12. A secondary signal of secondary electrons or reflected electrons, generated from the testpiece 12, is sucked into the accelerating tube 9 by the electric field (the decelerating field) immediately right before the testpiece and detected by a secondary electron detector arranged above the accelerating tube 9.
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Inventors:
Hideo Tosho
Makoto Esumi
Makoto Esumi
Application Number:
JP2005354293A
Publication Date:
August 29, 2007
Filing Date:
December 08, 2005
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H01J37/28; H01J37/141; H01J37/147; H01J37/244; H01L21/66
Domestic Patent References:
| JP5036371A | ||||
| JP6139985A | ||||
| JP4149944A | ||||
| JP5266855A | ||||
| JP61104960U | ||||
| JP3774953B2 |
Attorney, Agent or Firm:
Manabu Inoue