Title:
電子源およびそれを用いた電子線装置
Document Type and Number:
Japanese Patent JP6636472
Kind Code:
B2
Abstract:
An electron source that can be used stably for a long time even when hexaboride is used, and an electron beam device using the electron source are provided. The invention is directed to an electron source which includes a filament made of a metal, a metal tube that is fixed to the filament and has a plurality of recesses disposed at least in two axial directions so as to surround a central axis at an outer periphery, and a columnar hexaboride tip that emits an electron, is disposed so as to protrude from the inside of the metal tube to a side opposite to the filament, and is in contact with a bottom of each of the plurality of recesses of the metal tube.
Inventors:
Toshiaki Kusunoki
Keigo Kasuya
Taku Oshima
Tomihiro Hashizume
Noriaki Arai
Yoichi Ose
Keigo Kasuya
Taku Oshima
Tomihiro Hashizume
Noriaki Arai
Yoichi Ose
Application Number:
JP2017035882A
Publication Date:
January 29, 2020
Filing Date:
February 28, 2017
Export Citation:
Assignee:
Hitachi High-Technologies Corporation
International Classes:
H01J1/15; H01J1/16; H01J1/18; H01J37/06
Domestic Patent References:
| JP2017157368A | ||||
| JP2014229492A | ||||
| JP5094759A | ||||
| JP63276848A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation