To provide an electron source and its manufacturing method using metal inactive to chemical reaction caused by carbon brittleness and oxidation such as platinum causing little chemical change with carbon, for a part supporting a carbon nanotube, in order to eliminate geometric instability of an interface of the carbon nanotube and a metal base material, which causes image shake.
The electron source is formed by joining the carbon nanotube 3 to a metal filament 1 of such as platinum or palladium which is inactive to the chemical reaction caused by carbon brittleness and oxidation through carbon-based adhesive. Alternately, the electron source is formed by joining the carbon nanotube to a metal needle of such as platinum or palladium inactive to the chemical reaction caused by carbon brittleness and oxidation, and is provided on a V-shaped conductive metal filament base material through the carbon-based adhesive.
Suga, Hiroshi
Tanaka, Miyuki
