Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
ELECTRON SOURCE SUBSTRATE, ITS MANUFACTURE AND IMAGE FORMING DEVICE USING ELECTRON SOURCE SUBSTRATE
Document Type and Number:
Japanese Patent JP2000243327
Kind Code:
A
Abstract:

To prevent peeling caused by the weak adhesiveness between metal wires and a substrate and to prevent the characteristic deterioration of element electrodes caused by the diffusion of the metal wires along the boundary face between the element electrodes and the substrate by forming the element electrodes with a conductive oxide.

An inexpensive soda lime glass substrate 1 contains sodium, and it is manufactured by the float method for mass production. A sodium diffusion preventing layer 9 mainly made of silica is provided on the substrate 1 to prevent the diffusion of sodium into an electron emitting element from the substrate 1 and to prevent the heat by the current of the electron emitting element from being transferred to the substrate 1. A conductive oxide, which has stable conductivity after a heat treatment process and prevents the thermal diffusion of the constituting metal of wires 6, 7, is used for opposite element electrodes 2, 3 on the preventing layer 9. The film thickness is set to about tens nm to apply sufficient conductivity, and the step coverage of a conductive thin film 4 is improved. A tin oxide or a composite oxide of the tin oxide and an indium oxide is preferably used as the conductive oxide.


Inventors:
SHIBATA MASAAKI
Application Number:
JP4501799A
Publication Date:
September 08, 2000
Filing Date:
February 23, 1999
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
CANON KK
International Classes:
H01J9/02; H01J1/316; H01J29/04; H01J31/12; (IPC1-7): H01J31/12; H01J1/316; H01J9/02
Attorney, Agent or Firm:
Keisuke Watanabe (1 person outside)