To prevent peeling caused by the weak adhesiveness between metal wires and a substrate and to prevent the characteristic deterioration of element electrodes caused by the diffusion of the metal wires along the boundary face between the element electrodes and the substrate by forming the element electrodes with a conductive oxide.
An inexpensive soda lime glass substrate 1 contains sodium, and it is manufactured by the float method for mass production. A sodium diffusion preventing layer 9 mainly made of silica is provided on the substrate 1 to prevent the diffusion of sodium into an electron emitting element from the substrate 1 and to prevent the heat by the current of the electron emitting element from being transferred to the substrate 1. A conductive oxide, which has stable conductivity after a heat treatment process and prevents the thermal diffusion of the constituting metal of wires 6, 7, is used for opposite element electrodes 2, 3 on the preventing layer 9. The film thickness is set to about tens nm to apply sufficient conductivity, and the step coverage of a conductive thin film 4 is improved. A tin oxide or a composite oxide of the tin oxide and an indium oxide is preferably used as the conductive oxide.