Title:
ELECTRON SOURCE
Document Type and Number:
Japanese Patent JP2006012496
Kind Code:
A
Abstract:
To stably provide an electron source capable of maintaining high reliability even at an operation for long period.
On the electron source, in which electron emitting material composed of hexaboride of rare earth element is interposed between a pair of heating elements, and the heating elements are held by a pair of conductive supports, an insulation film is formed at an area not contacting the electron emitting material of the heating element and the conductive support. It is preferable for the electron source that the heating element is made of carbon, and the insulation film is made of boron nitride, more preferably, the insulation film is made of pyrolytic boron nitride.
Inventors:
SAKAWA MORIKAZU
NONOGAKI RYOZO
TERUI YOSHINORI
NONOGAKI RYOZO
TERUI YOSHINORI
Application Number:
JP2004185263A
Publication Date:
January 12, 2006
Filing Date:
June 23, 2004
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KK
International Classes:
H01J37/06; H01J1/15