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Patent Searching and Data


Title:
電子管
Document Type and Number:
Japanese Patent JP4098852
Kind Code:
B2
Abstract:
An electron tube 10 mainly includes a sleeve 12, an input plate 14 having a photocathode surface 18, a stem 16 and a CCD 20. A vacuum is provided in an interior of the electron tube 10. The CCD 20 is fixed onto the stem such that a rear surface B faces the photocathode surface 18. In the CCD 20, on a single conductive type semiconductor substrate 64, a buried layer 66, a barrier region 68, a SiO2 layer 70, a storage electrode layer 72, a transmission electrode layer 74, and a barrier electrode layer 76 are formed at their predetermined positions. A PSG film 78 is formed at an entire front surface A over these layers to flatten the surface of the CCD 20. Further, SiN film 106 mainly composed of SiN is formed above the PSG film over the entire front surface A.

Inventors:
Suyama Motohiro
Akihiro Kageyama
Masaharu Muramatsu
Application Number:
JP19886797A
Publication Date:
June 11, 2008
Filing Date:
July 24, 1997
Export Citation:
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Assignee:
Hamamatsu Photonics Co., Ltd.
International Classes:
H01J31/26; H01J29/44; H01J40/06; H01J40/14; H04N3/14; H04N5/225
Domestic Patent References:
JP7095434B2
JP8236743A
JP8153886A
JP7131055A
Attorney, Agent or Firm:
Yoshiki Hasegawa
Shiro Terasaki