Title:
ELECTRONIC BEAM TRANSFER EQUIPMENT
Document Type and Number:
Japanese Patent JPS61150328
Kind Code:
A
Abstract:
PURPOSE:To reduce the size of a transfer equipment and to lower the cost of installation thereof, by supplying pulsed electric current to a focusing magnet for minimizing the heat generation in a normally conductive magnet caused by the focusing magnet. CONSTITUTION:A vacuum container 11 of an electronic beam transfer equipment is evacuated by a vacuum pump 12. A photoelectric mask 13 in which a quartz substrate 13a is provided with a mask pattern 13b and a photoelectric surface 13c is disposed within the container. A material 15 applied with resist 14 is also disposed within the container so as to be opposed to the mask 13 and a voltage is applied between the mask 13 and the material 15 by a DC high- voltage power supply 16. A coil (focusing magnet) 19 is provided around the outer periphery of the container 11 for forming a magnetic field and supplied with electric current by a power supply for magnet 22. The current supplied to the coil 19 is controlled by a source control circuit 23 so as to be pulsed current, while a power supply for light power source 21 is controlled so as to control the light emittance of the light source 18 in synchronization with the control of the power source 22.
Inventors:
GOTO MINEO
MORI ICHIRO
TABATA MITSUO
MORI ICHIRO
TABATA MITSUO
Application Number:
JP27180384A
Publication Date:
July 09, 1986
Filing Date:
December 25, 1984
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
H01L21/027; H01L21/30; (IPC1-7): H01L21/30
Attorney, Agent or Firm:
Takehiko Suzue
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