To provide and inspection sensor capable of easily inspecting a disconnection in the middle of a pattern, a partial notch, or a short-circuit to an adjacent pattern, regardless of the shape of a conductive pattern which is an inspection object, for example, even in the case of a branch pattern.

This electronic circuit inspection sensor for inspecting the conductive pattern formed on an electronic circuit is equipped with square sensor elements 21, for example, having respectively the side length of, for example, one-third as long as the line width of the conductive pattern which is the inspection object, and disposed mutually close matrically, and an insulating layer formed at least on the surface of the sensor elements 21. The sensor elements 21 are positioned close to the conductive pattern which is the inspection object, and can detect a radiation wave generated from the conductive pattern which is the inspection object.