Title:
電子部品搭載装置および電子部品搭載方法
Document Type and Number:
Japanese Patent JP4222242
Kind Code:
B2
Inventors:
Yukiyama Hideyuki
Emoto Kodai
Yui Shinozaki
Emoto Kodai
Yui Shinozaki
Application Number:
JP2004091475A
Publication Date:
February 12, 2009
Filing Date:
March 26, 2004
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
H01L21/52; H01L21/60
Domestic Patent References:
| JP7007028A | ||||
| JP2003188194A |
Attorney, Agent or Firm:
Fumio Iwahashi
Hiroki Naito
Daisuke Nagano
Hiroki Naito
Daisuke Nagano
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