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Title:
ELECTRONIC COMPONENT MOUNTING DEVICE AND ELECTRONIC COMPONENT MOUNTING METHOD
Document Type and Number:
Japanese Patent JP2013161852
Kind Code:
A
Abstract:

To provide an electronic component mounting device capable of excellently pressure-joining a bump.

An electronic component mounting device includes: a first tool 5 which has a first region I where a first electronic component 20 having a first bump 21 on an upper side is placed thereon, and has a first projection 4f formed along an edge of the first region I and restricting a movement of the first electronic component 20 in a first lateral direction; a stage 3 which is provided with the first tool 5 thereon, and can move laterally; a second tool 8 which has a second region II where a second electronic component 30 having a second bump 31 joined to the first bump 21 is supported, and has second projections 7f and 7g formed along an edge of the second region II and restricting a movement of the second electronic component 30 in a second lateral direction opposite to the first lateral direction; a bonding arm 6 which is provided with the second tool 8 thereunder, and can move longitudinally; and arm driving parts 10 and 11 which move the bonding arm 6 longitudinally.


Inventors:
OZAKI KAZUO
Application Number:
JP2012020687A
Publication Date:
August 19, 2013
Filing Date:
February 02, 2012
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/60
Domestic Patent References:
JP2009010124A2009-01-15
JP2009010124A2009-01-15
JP2007067350A2007-03-15
JP2004186385A2004-07-02
JPH08335609A1996-12-17
Attorney, Agent or Firm:
Mitsuharu Kawakami