To provide an electronic device having a non-evaporative getter material disposed on a substrate and capable of keeping vacuum in a package without damaging an active device or a high-polymer material.

This electronic device 200 comprises a substrate 140, a transistor 120 formed on the substrate 140, a dielectric layer 150 covering at least part of the transistor 120, a layer 181 of a non-evaporative getter material (NEG material) disposed on a part of the dielectric layer 150, and a vacuum device 130 disposed on a part of the substrate 140. The NEG material 181 is activated by power pulses. By directly sticking the NEG material 181 to the substrate 140 used by both the vacuum device 130 and the transistor 120, the package is miniaturized and a separate getter cartridge is eliminated. The NEG material 181 can directly be heated to its activation temperature without damaging the transistor 120 or the vacuum device 130.