Title:
ELECTRONIC DEVICE AND METHOD OF MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP2004209585
Kind Code:
A
Abstract:
To provide an electronic device which is small and compact in size, free from deterioration of element characteristics caused by heating treatment, perfect in hermetical sealing, and has an MEMS element and other functional elements mounted thereon.
According to the structure of the electronic device, an element carrying space 8 is defined by a device main body 1 and a lid 2, and hermetically sealed by an ultrasonic bonded part 3. Then a fine mechanical component part 4 which is secured to the device main body 1 and/or the lid 2, is arranged in the element carrying space 8.
Inventors:
AZUMA MITSUTOSHI
Application Number:
JP2002381073A
Publication Date:
July 29, 2004
Filing Date:
December 27, 2002
Export Citation:
Assignee:
SHINKO ELECTRIC IND CO
International Classes:
B81B7/00; B81C3/00; H01L23/02; H01L23/04; B81B1/00; H01L23/053; H01L23/10; (IPC1-7): B81B1/00; B81C3/00; H01L23/02
Attorney, Agent or Firm:
Takashi Ishida
Yoshio Yoshio
Masaya Nishiyama
Higuchi Souji
Yoshio Yoshio
Masaya Nishiyama
Higuchi Souji