Title:
ピエゾ電気材料でできたマイクロ電気機械スイッチを備える電子装置
Document Type and Number:
Japanese Patent JP2007522609
Kind Code:
A
Abstract:
The device improved according to the invention comprises a micro-electromechanical switch (MEMS) with a piezoelectric element connected to a mechanical support on both sides at the edges. The electrode design of this piezoelectric element is characterized by two electrodes mounted on at least one of the surfaces.
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Inventors:
Perzel Heiko
Steeneken Peter G
Rewartel Astrid
Steeneken Peter G
Rewartel Astrid
Application Number:
JP2006546461A
Publication Date:
August 09, 2007
Filing Date:
December 21, 2004
Export Citation:
Assignee:
Koninklijke Philips Electronics N.V.
International Classes:
H01H57/00; B81B3/00; H01L41/09; H01L41/187; H01L41/257; H02N2/00; H01H1/00
Attorney, Agent or Firm:
Kenji Sugimura
Kosaku Sugimura
Kiyoshi Kuruma
Shiro Fujitani
Tatsuya Sawada
Susumu Tsugaru
Akihiko Miyazaki
Fueda Shusen
Kosaku Sugimura
Kiyoshi Kuruma
Shiro Fujitani
Tatsuya Sawada
Susumu Tsugaru
Akihiko Miyazaki
Fueda Shusen