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Title:
ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2014072048
Kind Code:
A
Abstract:

To provide an electronic device for sufficiently keeping connection of a movable electrode and a stationary electrode in an upward and downward direction.

An electronic device has: a movable beam 13 having flexibility between a first end 13a and a second end 13b that are fixed on a substrate 11; a piezoelectric film 17b that is formed on the movable beam 13 and extends toward a first flexion point x of the movable beam 13 under a curved state from the first end 13a, and whose length from a root of the movable beam 13 is set in a range of 90%-110% of a distance from the root of the movable beam 13 to the first flexion point x; a pair of drive electrodes 17a, 17c sandwiching the piezoelectric film 17b from above and below; a movable electrode 21b provided on the movable beam 13 between the first end 13a and the second end 13b; and a stationary electrode 23a formed at an upper part of the movable electrode 21b.


Inventors:
Katsuki, Takashi
Nakatani, Tadashi
Shimauchi, Takeaki
Okuda, Hisao
Application Number:
JP2012000217417
Publication Date:
April 21, 2014
Filing Date:
September 28, 2012
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01H57/00; B81B3/00
Attorney, Agent or Firm:
川上 光治