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Title:
ELECTRONIC ELEMENT INCLUDING ELECTRODE HAVING INSULATING SPACER AND ITS FORMING METHOD
Document Type and Number:
Japanese Patent JP2005150747
Kind Code:
A
Abstract:

To provide an electronic element including an electrode having an insulating spacer.

The electronic element includes a substrate and a conductive electrode formed on the substrate. The conductive electrode may have an electrode wall extending in a direction isolated from the substrate. The insulating space is provided on the electrode wall and no insulating spacer exists on a portion of the electrode wall between the substrate and the insulating spacer. Hereby, a leaning phenomenon is suppressed or even if the leaning phenomenon occurs, a short circuit between neighboring storage electrodes owing to the leaning phenomenon can be prevented.


Inventors:
YEO IN-JUN
AHN TAE-HYUK
LEE KWANG-WOOK
JEON JUNG-SIK
JO TEIU
Application Number:
JP2004330679A
Publication Date:
June 09, 2005
Filing Date:
November 15, 2004
Export Citation:
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Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
H01L27/108; H01L21/02; H01L21/20; H01L21/8242; (IPC1-7): H01L21/8242; H01L27/108
Domestic Patent References:
JP2003297952A2003-10-17
JP2001284273A2001-10-12
JP2004072078A2004-03-04
JP2005064504A2005-03-10
JP2003142605A2003-05-16
JP2005032982A2005-02-03
Foreign References:
US6667502B12003-12-23
US6133109A2000-10-17
US20010026974A12001-10-04
US20030162361A12003-08-28
Attorney, Agent or Firm:
Mikio Hatta
Yasuo Nara
Etsuko Saito
Katsuyuki Utani
Toshifumi Fujii



 
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