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Title:
差分センサMEMSデバイスおよび穿孔した基板を有する電子機器
Document Type and Number:
Japanese Patent JP2010517021
Kind Code:
A
Abstract:
Electronic device (1, 1a, 1b, 1c, 1d, 1e) which comprises: - a substrate (2) provided with at least one passing opening (5), - a MEMS device (7) with function of differential sensor provided with a first and a second surface (9, 10) and of the type comprising at lesat one portion (11) sensitive to chemical and/or physical variations of fluids present in correspondence with a first and a second opposed active surface (11a, 11b) thereof, the first surface (9) of the MEMS device (7) leaving the first active surface (11 a) exposed and the second surface (10) being provided with a further opening (12) which exposes said second opposed active surface (11b), the electronic device (1, 1d, 1e) being characterised in that the first surface (9) of the MEMS device (7) faces the substrate (2) and is spaced therefrom by a predetermined distance, the sensitive portion (11) being aligned to the passing opening (5) of the substrate (2), and in that it also comprises - a protective package (14, 14a, 14b), which incorporates at least partially the MEMS device (7) and the substrate (2) so as to leave the first and second opposed active surfaces (11a, 11b) exposed respectively through the passing opening (5) of the substrate (2) and the further opening (12) of the second surface (10).

Inventors:
Lorenzo Bardot
Chantal combination
Mario Francesco Cortese
Application Number:
JP2009546683A
Publication Date:
May 20, 2010
Filing Date:
January 23, 2008
Export Citation:
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Assignee:
STMicroelectronics S.r.l.
International Classes:
G01L13/06; B81B3/00; H01L23/02; H01L25/00; H01L25/16; H01L29/84
Domestic Patent References:
JP2000019042A2000-01-21
JPS53142887A1978-12-12
JPH11230846A1999-08-27
JPH10274583A1998-10-13
JP2000019042A2000-01-21
JPS53142887A1978-12-12
JPH11230846A1999-08-27
Foreign References:
WO2008065883A12008-06-05
US4763098A1988-08-09
US4763098A1988-08-09
WO2008065883A12008-06-05
Attorney, Agent or Firm:
Kenji Sugimura
Tatsuya Sawada
Harima Satoko