Title:
ELECTRONIC MICROSCOPE
Document Type and Number:
Japanese Patent JPS53104152
Kind Code:
A
Abstract:
PURPOSE: To establish the electronic microscope which can detects the secondary electrons and X-rays at a location sufficiently close to the test piece surface, by providing throughhole at the magnetic tube facing the electron ray path of the objective lens and mounting the secondary electron detector and X-ray detector.
Inventors:
KATSUTA TEIJI
Application Number:
JP1866077A
Publication Date:
September 11, 1978
Filing Date:
February 24, 1977
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01J37/244; H01J37/28; (IPC1-7): H01J37/28
Previous Patent: HIGH SPEED EXCLUSIVE OR*NOR CIRCUIT
Next Patent: DEFLECTION ELECTRODE UNIT IN CATHODE RAY TUBE
Next Patent: DEFLECTION ELECTRODE UNIT IN CATHODE RAY TUBE