Title:
電解メッキ液分析装置、電解メッキ液分析方法および電解メッキ液分析用プログラム
Document Type and Number:
Japanese Patent JP6777503
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To specify concentrations of multiple kinds of contained substances in a short period of time.SOLUTION: A storage unit 34 stores: data D2 in which analytical parameters based on results of measurement processing performed at a plurality of reduction potentials for samples Xb1 to Xb9 in different combinations of concentrations of N kinds of contained substances are associated with the concentrations of the respective contained substances and the reduction potentials; and data D0 of an analytical model formula representing correlation between the concentrations of the respective contained substances and the respective parameters. In analysis processing, a processing unit 33 performs: first processing to specify for the respective contained substances a first model formula satisfying a first criterion from a plurality of first model formulas in which the respective parameters and the concentrations of the respective contained substances are substituted into the model formula for respective reduction potentials of the respective samples Xb; and second processing to specify the concentrations of the respective contained substances on the basis of each of second model formulas in which the parameters based on results of measurement processing performed for an electrolytic plating solution Xa at a reduction potential associated with the specified first model formula are substituted into the model formulas corresponding to N pieces of the first model formulas.SELECTED DRAWING: Figure 1
Inventors:
Naoto Nakayama
Yoshiaki Nakagawa
Yoshiaki Nakagawa
Application Number:
JP2016217705A
Publication Date:
October 28, 2020
Filing Date:
November 08, 2016
Export Citation:
Assignee:
Hioki Electric Co., Ltd.
International Classes:
G01N27/48; C25D21/12; G01N27/26; G01N27/416
Domestic Patent References:
| JP2005534012A | ||||
| JP2016105072A | ||||
| JP2009052118A | ||||
| JP2005533928A |
Foreign References:
| US20070261963 | ||||
| US20030111993 |
Other References:
中山直人,電気化学測定を用いためっき液の品質管理,日置技報,2016年 4月27日,Vol.37, No.1,p.1-5
中山直人,電気化学計測を用いためっき液の性能評価,計測自動制御学会中部支部シンポジウム講演論文集,2015年,p.14-17
中山直人,電気化学計測を用いためっき液の性能評価,計測自動制御学会中部支部シンポジウム講演論文集,2015年,p.14-17
Attorney, Agent or Firm:
Shinji Sakai