Title:
ELECTROSTATIC ACCELERATOR
Document Type and Number:
Japanese Patent JP2522222
Kind Code:
B2
Abstract:
PURPOSE: To provide an electrostatic accelerator by which metal being diffused outside from an electric charge converting cell of the electrostatic accelerator can be reduced significantly and pollution to a surrounding constituent material can be reduced and a maintenance period of a device can be lengthened in simple constitution.
CONSTITUTION: A shutter mechanism 5 (shutters 5a and 5b and the driving mechanisms 51 and 52) is arranged in an ion inlet port and an outlet port 21a and 21b of an electric charge converting cell to produce electric charge converting metal vapor inside, and the shutters 5a and 5b are constituted so as to be opened only when an ion beam is necessary.
Inventors:
KONISHI IKUO
Application Number:
JP17084292A
Publication Date:
August 07, 1996
Filing Date:
June 29, 1992
Export Citation:
Assignee:
SHIMADZU CORP
International Classes:
G21K1/14; H01J37/08; H01L21/265; H05H5/02; H05H5/06; (IPC1-7): H05H5/06; G21K1/14; H01J37/08; H05H5/02
Domestic Patent References:
| JP63195599A |
Attorney, Agent or Firm:
Nishida Arata