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Patent Searching and Data


Title:
ELECTROSTATIC ACTUATOR AND CONVEYOR USING IT
Document Type and Number:
Japanese Patent JP2003070266
Kind Code:
A
Abstract:

To provide an electrostatic actuator which materializes smooth drive by preventing the hitting and rubbing between a stator and a mover, and a conveyor using it.

This electrostatic actuator comprises a stator which is provided with electrodes for applying voltage to upper and lower surfaces and whose electrode is covered with an insulating film, a mover on the upper surface side which is provided with an electrode for applying voltage in a position opposed to the upper surface of the stator and besides whose electrode is covered with an insulating film, and a mover on the lower surface side which is provided with an electrode for applying voltage in a position opposed to the lower surface of the stator and whose electrode is covered with an insulating film.


Inventors:
ASO YUJI
KIYOHARA MASAKATSU
Application Number:
JP2001259882A
Publication Date:
March 07, 2003
Filing Date:
August 29, 2001
Export Citation:
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Assignee:
TOTO LTD
International Classes:
B65G54/02; H02N1/00; (IPC1-7): H02N1/00; B65G54/02