To provide an electrostatic actuator which materializes smooth drive by preventing the hitting and rubbing between a stator and a mover, and a conveyor using it.
This electrostatic actuator comprises a stator which is provided with electrodes for applying voltage to upper and lower surfaces and whose electrode is covered with an insulating film, a mover on the upper surface side which is provided with an electrode for applying voltage in a position opposed to the upper surface of the stator and besides whose electrode is covered with an insulating film, and a mover on the lower surface side which is provided with an electrode for applying voltage in a position opposed to the lower surface of the stator and whose electrode is covered with an insulating film.
KIYOHARA MASAKATSU