Title:
静電アクチュエータ装置とその駆動方法
Document Type and Number:
Japanese Patent JP4113673
Kind Code:
B2
Abstract:
An electrostatic actuator device and method for actuating the device. The device includes a pair of actuator plates having electrodes for conducting a voltage potential thereto and at least one of the pair being movable with respect to the other. The plates are positioned to move upon application of a voltage potential through electrodes attached thereto. A driving means provides a voltage potential to the electrodes to cause the movement of the at least one plate. The driving means produces compound AC signal with rise/fall sections at least 10 to 100 times (preferably more than twenty times) the mechanical response time of the actuator. The preferred AC signals are selected from square-wave, sine wave, triangle wave and mixtures thereof. The preferred circuit produces rise/fall sections that are a quarter of a full period of the AC wave signal, and only the nominal section of the compound AC signal is used for driving the actuator.
Inventors:
Kabutsu, Cleopatra
Kabutsu, Jugen
Kabutsu, Jugen
Application Number:
JP2000581740A
Publication Date:
July 09, 2008
Filing Date:
November 06, 1998
Export Citation:
Assignee:
Honeywell International Inc.
International Classes:
F16K31/02; F15C5/00; H02N1/00
Domestic Patent References:
| JP9254381A | ||||
| JP10248270A | ||||
| JP9051685A |
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Yoshio Akimoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Yoshio Akimoto