To provide an electrostatic actuator capable of securing sufficient dielectric strength voltage between electrodes, and also reducing residual charges on a surface of an insulating film.
The electrostatic actuator includes a silicon substrate 2 on which a flexible diaphragm 12 constituting a movable electrode is formed, and an electrode substrate 3 having a fixed electrode 17 opposed to the diaphragm 12 through a void 22, wherein a plurality of first insulating films 16a are formed on an upper surface of the fixed electrode 17 with a gap 16c, and second insulating films 16b are formed on upper surfaces of the plurality of first insulating films 16a and the upper surface of the fixed electrode 17 around the first insulating films 16a.
COPYRIGHT: (C)2010,JPO&INPIT
Kiyoshi Yasushima
Souji Sasaki
Noboru Omura
Takanashi Norio