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Title:
ELECTROSTATIC ACTUATOR
Document Type and Number:
Japanese Patent JP3183319
Kind Code:
B2
Abstract:

PURPOSE: To provide an electrostatic actuator in which the output is prevented from lowering owing to frictional resistance by arranging the electrodes of first and second fixed bodies while shifting from each other and setting the pitch of electrode on a movable body at a predetermined value.
CONSTITUTION: Fixed bodies 1, 2 comprise insulators 1, 2 arranged, on the surface, with stripe electrodes 12n, 22m at a pitch λ in the moving direction. The stripe electrodes are connected with two phases of conductors A, B and C, D for each electrode. A movable body 3 comprises an insulator 31 arranged, on the surface, with stripe electrodes 32n at a pitch 2λ in the moving direction. The fixed bodies 1, 2 are positioned such that the electrodes are shifted by λ/ 2 by holding the gap through a spacer 4. A positive voltage is applied to phase C under a state where the electrode 32n is touching the electrode 22b. When a negative voltage is applied to the electrode of phase A, the electrode 32n is attracted electrostatically to the electrode of phase A. In other words, the mover is moved to the right. Subsequently, the voltage of phase C is brought to zero. When a positive voltage is applied to the electrode of phase D, the electrode 32n is attracted electrostatically to the electrode of phase D and the mover 3 is moved to the right.


Inventors:
Takayuki Nakamura
Kazunari Matsuzaki
Application Number:
JP6178695A
Publication Date:
July 09, 2001
Filing Date:
February 24, 1995
Export Citation:
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Assignee:
Yaskawa Electric Co., Ltd.
International Classes:
H02N1/00; B81B5/00; (IPC1-7): H02N1/00
Domestic Patent References:
JP6395863A
JP3169278A
JP3270682A
JP2311186A