Title:
ELECTROSTATIC ATTRACTION APPARATUS
Document Type and Number:
Japanese Patent JPH06244271
Kind Code:
A
Abstract:
PURPOSE: To enable an electrostatic attraction apparatus to keep stably having an enough electrostatic attraction force for a long term.
CONSTITUTION: An alternate current power supply 5 is provided to apply an alternating voltage to pairs of electrodes 2, the primary and secondary of the alternate current power supply 5 are insulated from each other, the secondary of the power supply 5 which applies an alternating high voltage to the electrodes 2 are kept at a floating potential to a ground potential.
Inventors:
MIZUNO EIICHI
HAYASHI TOSHIO
HAYASHI TOSHIO
Application Number:
JP3040793A
Publication Date:
September 02, 1994
Filing Date:
February 19, 1993
Export Citation:
Assignee:
ULVAC CORP
International Classes:
B23Q3/15; H01L21/302; H01L21/68; H01L21/683; H02N13/00; (IPC1-7): H01L21/68; B23Q3/15; H02N13/00
Attorney, Agent or Firm:
Shigeru Yagita (4 outside)