Title:
ELECTROSTATIC CAPACITANCE TYPE TRANSDUCER AND ACOUSTIC SENSOR
Document Type and Number:
Japanese Patent JP2017163408
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technology capable of avoiding damage of a vibration electrode film by suppressing excessive deformation of the vibration electrode film even if the vibration electrode film is deformed in any direction in the case where an excessive pressure acts on an acoustic sensor.SOLUTION: An electrostatic capacitance type transducer comprises a back plate 37, and a vibration electrode film 35 which is disposed oppositely to the back plate 37 while interposing a cavity between the vibration electrode film and the back plate 37. The electrostatic capacitance type transducer further comprises: a pressure release hole 35b which is provided in the vibration electrode film 35; a projection 37b which is formed from the same material as the back plate 37 and provided integrally with the back plate 37 and enters the pressure release hole 35b in a state before deformation of the vibration electrode film 35; and a pressure release flow passage that is an air flow passage formed from a gap between the pressure release hole 35b and the projection 37b. The projection 37b includes, in a predetermined region at a side of the back plate 37, a cross-sectional area decreased part of which the cross-sectional area is smaller than a region that is closer to a distal end than the predetermined region, in the projection 37b.SELECTED DRAWING: Figure 8
Inventors:
KASAI TAKASHI
MOMOTANI KOJI
TERASAKA MARIKO
MOMOTANI KOJI
TERASAKA MARIKO
Application Number:
JP2016047305A
Publication Date:
September 14, 2017
Filing Date:
March 10, 2016
Export Citation:
Assignee:
OMRON TATEISI ELECTRONICS CO
International Classes:
H04R19/00; B81B3/00; H01L29/84; H04R31/00
Domestic Patent References:
| JP2015056833A | 2015-03-23 | |||
| JP2015056832A | 2015-03-23 | |||
| JP2008259061A | 2008-10-23 |
Foreign References:
| US20140353780A1 | 2014-12-04 | |||
| US20140084396A1 | 2014-03-27 |
Attorney, Agent or Firm:
Kazunobu Sera
Yoshiyuki Kawaguchi
Hiroyasu Kanai
Takehiko Sekine
Takeshi Nakamura
Katsuhiko Imahori
Hironobu Yazawa
Yoshiyuki Kawaguchi
Hiroyasu Kanai
Takehiko Sekine
Takeshi Nakamura
Katsuhiko Imahori
Hironobu Yazawa
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