PURPOSE: To obtain an electrostatic capacity type displacement detector having excellent detecting accuracy, by providing many main electrodes, which are separated at an equal distance, on one member that is relatively displaced in the displacing direction, and providing main detecting electrodes of specified numbers, which are arranged on the other member in parallel with the displacing direction.
CONSTITUTION: Many main electrodes 26, which are separated by an equal distance P, and provided on a main scale 21 of vernier calipers in the displacing directions. Regions 34 of a required number are formed on a vernier 29, whose width is equal to the distance P, in parallel with the displacing direction so that the regions 34 can face the electrodes 26. Main detecting electrodes 35 are aranged in the regions 34. One end of each electrode 35 is separated in the displacing direction by a distance Q, respectively. Secondary detecting electrodes 37 and grounded shield electrodes 38 are provided on the back surface of a thin plate 33, on which the electrodes 35 are provided. The capacitors (C) 40 and 42 are formed by the electrodes 26, 35, 37, and 38. Pulses are supplied to delay circuits 39 and 41, whose number is the same as that of the electrodes 35 having (C) 40 and 42, from a pulse generating circuit 43. The facing state of the electrodes 26 and 35 are detected by a phase discriminating circuits 44, and the amount of relative displacement is displayed by a display device 48. Thus the main detecting electrodes can be made large and detecting accuracy can be improved.
NANBA KAZUTAKA
NAKAMURA SEISAKUSHO KK