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Title:
ELECTROSTATIC CAPACITY TYPE PRESSURE SENSOR, ITS PRODUCTION AND GAS ABNORMALITY MONITOR DEVICE USING ELECTROSTATIC CAPACITY TYPE PRESSURE SENSOR
Document Type and Number:
Japanese Patent JP10009985
Kind Code:
A
Abstract:

To provide a pressure sensor for judging the presence of the minute leak of gas in gas equipment or accurately judging whether the pressure adjusting function of a pressure adjusting device is normal.

The sensing electrode 11 and reference electrode 12 on a fixing substrate 10 are perfectly separated by isolation electrodes 13 and a first electrode constituted of the sensing electrode 11, the reference electrode 12 and the isolation electrodes 13 and the fixing substrate having a continuity small hole crossing the first electrode at a right angle are arranged in opposed relation to a diaphragm having a second electrode formed thereto. By this constitution, an electrostatic capacity type pressure sensor excellent in temp. characteristics can be constituted.


Inventors:
Monju, Hideto
Fujii, Yuko
Application Number:
JP1996000165680
Publication Date:
January 16, 1998
Filing Date:
June 26, 1996
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
G01L9/12; G01L9/12; (IPC1-7): G01L9/12