PURPOSE: To decrease a secular change by using alumina for a base supporting part and a diaphragm and to reduce the inclination of the output of a pressure sensor with temperature by forming branch-shaped electrodes closely to a sealing member in the middle of the electrode lead-out part of an electrode for detecting electrostatic capacity.
CONSTITUTION: An electrode 2 is formed at the base supporting part 1 where when pressure (p) is applied to the diaphragm 4, the diaphragm 4 deforms most, and an electrode 3 is formed where the diaphragm deforms a little against variation in the pressure; and conductive layer of a couple of left and right branch-shaped electrodes 9 and 10 are formed in the middle of the electrode lead-out part 11 of the electrode 2 which senses pressure, said electrode 3 is made concentrically near a glass layer 7, and the electrode lead-out part 12 is formed. When the electrode is formed near the sealing member (glass layer 7), the additional amount of floating capacity from alumina and the glass sealing member as materials constituting a detection capsule part increases in addition to original electrostatic capacity generated between the electrodes under a vacuum.
MAKINO OSAMU