To provide a sensor capable of making measurement with high sensitivity while improving the response speed, preventing the infiltration of dust and the corrosion of electrodes, capable of exerting the desired effect over a long period, and having a long service life and high reliability.

A hollow gap 12 is formed in a diaphragm 11 warped by a physical quantity, and beam electrodes 22b are provided at a space in the displacement direction of the diaphragm 11 in the gap 12. The fixed electrodes 22b are not deformed even when the diaphragm 11 is warped, and the distance to the face of the opposite diaphragm 11 is changed. Moving electrodes 17a, 17b are provided at the prescribed positions of the inner face of the diaphragm 11 facing the fixed electrode 22b. Wire pads 20a-20c outputting the signals corresponding to the electrostatic capacities occurring between the moving electrodes 17a, 17b and the fixed electrodes 22b are provided, and the inside of the gap 12 is kept vacuum.