Title:
ELECTROSTATIC CAPACITY TYPE TRANSDUCER
Document Type and Number:
Japanese Patent JP3604243
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide such an electrostatic capacity type transducer that can secure high bonding property as well as high detection accuracy and improve corrosion resistance.
SOLUTION: This transducer is provided with a substrate 30, a movable electrode 20 which is arranged opposite to a void in a manner that it may be displaceable to the substrate 30, fixed electrodes 31 and 32 provided on a detection surface 30A facing the electrode 20 of the substrate 30, and signal picking-up parts 34 and 35 which have a continuity with the electrodes 31 and 32 and are pulled out from the detection surface 30A of the substrate 30. The electrodes 31 and 32 and the parts 34 and 35 are formed of metals whose compositions differ from each other. Thus, they are allowed to have desired characteristics respectively.
Inventors:
Seiichi Yokoyama
Fumio Kaize
Koji Ito
Yukimitsu Sekimori
Fumio Kaize
Koji Ito
Yukimitsu Sekimori
Application Number:
JP31623796A
Publication Date:
December 22, 2004
Filing Date:
November 27, 1996
Export Citation:
Assignee:
Nagano Keiki Co., Ltd.
International Classes:
G01L9/12; G01L19/06; H04R19/00; (IPC1-7): G01L9/12; G01L19/06
Domestic Patent References:
| JP55055235A | ||||
| JP8189870A |
Attorney, Agent or Firm:
Kinoshita Minoru
Kanji Nakayama
Kanji Nakayama