Title:
ELECTROSTATIC CHUCK AND PROCESSING APPARATUS
Document Type and Number:
Japanese Patent JP2023035856
Kind Code:
A
Abstract:
To provide an electrostatic chuck and a processing apparatus capable of maintaining an effect of suppressing arc discharge for a long period of time.SOLUTION: An electrostatic chuck comprises: a bonding part provided between a substrate and a base plate; a gas introduction path having a first hole part located on the substrate, a second hole part located on the base plate, and a third hole part located on the bonding part; a counterbore part which is provided on at least either one of the first hole part and the second hole part; and a porous part, provided on the counterbore part, which has an exposed surface exposed from the third hole part. If a direction from the base plate to the substrate is defined as a first direction, then the porous part has: a porosity part having gas permeability; and a dense part denser than the porosity part. The dense part is disposed so as to cover an outer periphery of the porosity part. At least a part of the dense part has a first protruding part which protrudes from the exposed surface to the third hole part along the first direction.SELECTED DRAWING: Figure 2
Inventors:
SASAKI YUKI
SHIRAISHI JUN
MOMIYAMA DAI
KONO REO
SHIRAISHI JUN
MOMIYAMA DAI
KONO REO
Application Number:
JP2022114207A
Publication Date:
March 13, 2023
Filing Date:
July 15, 2022
Export Citation:
Assignee:
TOTO LTD
International Classes:
H01L21/683; H01L21/3065; H02N13/00
Attorney, Agent or Firm:
Hyuga Temple Masahiko