Title:
ELECTROSTATIC CHUCK SYSTEM, DEPOSITION DEVICE, ADSORBED BODY SEPARATION METHOD, DEPOSITION METHOD AND MANUFACTURING METHOD FOR ELECTRONIC DEVICE
Document Type and Number:
Japanese Patent JP2020053684
Kind Code:
A
Abstract:
To satisfactorily separate a first adsorbed body and a second adsorbed body adsorbed onto an electrostatic chuck from the electrostatic chuck.SOLUTION: The electrostatic chuck system includes an electrostatic chuck including electrode parts; a voltage application section for applying a voltage to the electrode part of the electrostatic chuck; and a voltage control section for controlling voltage application by the voltage application section. The voltage control section controls the voltage application section to apply a first separation voltage for separating the second adsorbed body from the first adsorbed body independently of each of the plurality of electrode parts of the electrostatic chuck in which a first adsorbed body and a second adsorbed body through the first adsorbed body are adsorbed.SELECTED DRAWING: Figure 7
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Inventors:
KASHIWAKURA KAZUFUMI
ISHII HIROSHI
ISHII HIROSHI
Application Number:
JP2019171658A
Publication Date:
April 02, 2020
Filing Date:
September 20, 2019
Export Citation:
Assignee:
CANON TOKKI CORP
International Classes:
H01L21/683; C23C14/24; H01L51/50; H02N13/00; H05B33/10
Attorney, Agent or Firm:
Hidewa Patent Office