Title:
静電チャックシステム、成膜装置、被吸着体分離方法、成膜方法及び電子デバイスの製造方法
Document Type and Number:
Japanese Patent JP7224172
Kind Code:
B2
Abstract:
To satisfactorily separate a first adsorbed body and a second adsorbed body adsorbed onto an electrostatic chuck from the electrostatic chuck.SOLUTION: The electrostatic chuck system includes an electrostatic chuck including electrode parts; a voltage control section for controlling a voltage to be applied to the electrode parts of the electrostatic chuck. When a first adsorbed body is adsorbed on the electrode part of the electrostatic chuck and a second adsorbed body is adsorbed on the electrode part of the electrostatic chuck through the first adsorbed body, the voltage control section applies a separation voltage for separating the first adsorbed body and the second adsorbed body in contact with each other together from the electrostatic chuck.SELECTED DRAWING: Figure 7
Inventors:
Kazushi Kashiwakura
Hiroshi Ishii
Hiroshi Ishii
Application Number:
JP2018241424A
Publication Date:
February 17, 2023
Filing Date:
December 25, 2018
Export Citation:
Assignee:
Canon Tokki Co., Ltd.
International Classes:
H01L21/683; C23C14/04; C23C14/50; H02N13/00; H05B33/10; H10K50/00
Domestic Patent References:
| JP2006299358A | ||||
| JP2006261489A | ||||
| JP2013239441A |
Foreign References:
| WO2006049085A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Shuwa Patent Office