Title:
ELECTROSTATIC CHUCK
Document Type and Number:
Japanese Patent JP3426845
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce the leakage current thereby enabling a held item to avert an infavorable electrical effect on a held item by a method wherein an electrostatic chuck is formed of yttrium-aluminum-garnet on a suction surface suction- holding the held item by electrostatic action thereby enabling the held item to be held by high suction force.
SOLUTION: The title electrostatic chuck is composed of a surface of a tabular body 1 made of single crystalline or polycrystalline yttrium-aluminum- garnet (YAG material) to be a suction surface 5 as well as an electrode 2 for electrostatic suction provided on the bottom and a base plate 4 made of the same YAG material as that of the tabular body 1 or sapphire or the other various kinds of ceramics junctioned with one another through the intermediary of an adhesive 3. Besides, an electrode taking off part 4a for making the electrode 2 conductive to the base plate 4 is formed. Finally, the electrode 2 is made conductive to a semiconductor wafer 6 mounted on suction surface 5 through the electrode taking off part 4a so that Coulomb force may be acquired by dielectric polarization between the tabular body 1 and the wafer 6 thereby enabling the wafer 6 to be suction-held on the suction surface 5.
Inventors:
Toshikazu Kishino
Shunichi Murakawa
Shunichi Murakawa
Application Number:
JP10711396A
Publication Date:
July 14, 2003
Filing Date:
April 26, 1996
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
B23Q3/15; C01F17/00; C04B35/44; H01L21/68; H01L21/683; (IPC1-7): H01L21/68; C01F17/00; C04B35/44
Domestic Patent References:
| JP6291049A | ||||
| JP521628A | ||||
| JP6199566A |