Title:
ELECTROSTATIC CHUCKING DEVICE
Document Type and Number:
Japanese Patent JP2002093895
Kind Code:
A
Abstract:
To provide an electrostatic chucking device which is improved to attract properly, even if the conductive part of an object to be attracted is divided into several parts as in a liquid-crystal glass substrate, while the form dimension differs, depending on device kind.
An electrostatic chuck is provided, where a conductive material or an insulating material 10 partially comprising a conductive part, is attracted by electrostatic force. At least four voltage applied electrodes 2 are provided, with each voltage applied electrode 2 capable of being applied with an arbitrary voltage.
Inventors:
MORIMOTO MITSUAKI
Application Number:
JP2000274520A
Publication Date:
March 29, 2002
Filing Date:
September 11, 2000
Export Citation:
Assignee:
SHARP KK
International Classes:
G02F1/1345; B23Q3/15; H01L21/68; H01L21/683; H02N13/00; (IPC1-7): H01L21/68; G02F1/1345; H02N13/00
Attorney, Agent or Firm:
Fukami Hisaro