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Title:
ELECTROSTATIC CHUCKING DEVICE
Document Type and Number:
Japanese Patent JPS61270046
Kind Code:
A
Abstract:

PURPOSE: To aim at automation of up to the attraction of a sample on a base plate with a simple device, by impressing the voltage that attracts the sample to an interval between the base plate and a sample electrode from a DC high voltage power source and, when the charging voltage exceeds the specified value, making it so as to ascertain the conduction between the sample and the sample electrode.

CONSTITUTION: When a sample electrode 3 is made to come into contact with a sample 2 and an on-switch 15 is closed, a self-holding relaying relay 11 is set in motion by each conductive passage of an off-switch 16 and normally closed contacts 14b and 12b, forming a self- holding circuit by means of a closed passage of a normally opened contact 11a1, while reference voltage to be outputted out of a reference voltage generator 8 by a closed passage of a normally opened contact 11a2 is inputted into a DC voltage power source 4. Next, the power source 4 outputs such high voltage that attracts the sample 2 onto a base plate 1 by input of the reference voltage, impressing it on an interval between the base plate 1 and the sample electrode 3. Hereat, output voltage V of the power source 4, immediately after impressing, is almost added to the interval between the sample 2 and the sample electrode 3, inducing a dielectric breakdown there, and since the interval between the sample 2 and the sample electrode 3 is conducted, the sample 2 is automatically attracted on the base plate 1 without using another power source and a dielectric breakdown device.


Inventors:
KASAHARA IZUMI
KURISHIMA TAKESHI
Application Number:
JP10956985A
Publication Date:
November 29, 1986
Filing Date:
May 22, 1985
Export Citation:
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Assignee:
TOSHIBA MACHINE CO LTD
International Classes:
H01L21/683; B23Q3/15; H01L21/67; H01L21/68; (IPC1-7): B23Q3/15; H01L21/68
Domestic Patent References:
JPS5979545A1984-05-08
JPS59127847A1984-07-23
Attorney, Agent or Firm:
Takehiko Suzue



 
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