Title:
ELECTROSTATIC DISCHARGE SIMULATOR
Document Type and Number:
Japanese Patent JPH09281173
Kind Code:
A
Abstract:
To surely obtain a specified current waveform and to improve the reproducibility of an electrostatic discharge test.
This electrostatic discharge simulator 1 has a high-voltage power source 2 for generating a high voltage, a charger/discharger 3 for discharging after the high voltage of the power source 2 is charged, a discharge tip 5 for discharging the high voltage charged at the discharger 3 to a testpiece 4 or a metal plate disposed near the testpiece 4, and a sensing means 6 for sensing the contact of the testpiece 4 having conductivity or the plate with the tip 5.
Inventors:
MINAMI TERUO
KAWAMURA TAKEKATSU
YAMADA TOSHIAKI
KAWAMURA TAKEKATSU
YAMADA TOSHIAKI
Application Number:
JP12095396A
Publication Date:
October 31, 1997
Filing Date:
April 18, 1996
Export Citation:
Assignee:
NIKON CORP
BITSUGU BAAN KK
BITSUGU BAAN KK
International Classes:
G01R31/00; G01R31/30; (IPC1-7): G01R31/00; G01R31/30
Attorney, Agent or Firm:
渡辺 秀治
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