ELECTROSTATIC DRIVE UNIT AND OPTICALYSWITCH HAVING THE ELECTROSTATIC DRIVE UNIT

Title:

ELECTROSTATIC DRIVE UNIT AND OPTICALYSWITCH HAVING THE ELECTROSTATIC DRIVE UNIT

Document Type and Number:

Japanese Patent JP2003244971

Kind Code:

A

Abstract:

To provide an electrostatic drive unit which is able to drive a mover arranged perpendicular to a substrate surface.

A Si substrate of high resistance is etched to provide a hole, and Ni plating is applied so that Ni is filled in the hole, and thereafter a Ni layer on the substrate surface is removed. In this manner, the Ni layer insulated by a Si layer of high resistance is formed, and an electrode 54 is generated to which an driving voltage to drive the mover 53 is supplied.

Inventors:

FUJII YASUHISA
YOKOYAMA HIKARI
YAMAMOTO HIROKO

Application Number:

JP2002039667A

Publication Date:

August 29, 2003

Filing Date:

February 18, 2002

Export Citation:

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Assignee:

MINOLTA CO LTD

International Classes:

G02B26/02; B81B5/00; B81C1/00; G02B26/08; H02N1/00; (IPC1-7): H02N1/00; B81B5/00; G02B26/02; G02B26/08

Attorney, Agent or Firm:

Shizuo Sano (1 outside)

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