Title:
非対称静電構成を有する静電フィルタおよびイオン注入装置
Document Type and Number:
Japanese Patent JP7190570
Kind Code:
B2
Abstract:
An apparatus may include a main chamber, an entrance tunnel, having an entrance axis extending into the main chamber, and an exit tunnel, connected to the main chamber and defining an exit axis, wherein the entrance tunnel and the exit tunnel define a beam bend of less than 25 degrees therebetween. The apparatus may include an electrode assembly, disposed in the main chamber, on a lower side of the exit tunnel; and a catch assembly, disposed within the main chamber, in a line of sight from an exterior aperture of the exit tunnel.
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Inventors:
Rihansky, Alexandre
Sinclair, Frank
Chan, Shonwoo
Harmanson, Eric Dee.
Clay, Nevin H.
Sinclair, Frank
Chan, Shonwoo
Harmanson, Eric Dee.
Clay, Nevin H.
Application Number:
JP2021526767A
Publication Date:
December 15, 2022
Filing Date:
October 31, 2019
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
H01J37/317; H01J37/05
Domestic Patent References:
| JP2008204944A |
Foreign References:
| US7022984 | ||||
| US20050133736 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation