Title:
静電浮遊炉
Document Type and Number:
Japanese Patent JP4301946
Kind Code:
B2
Abstract:
An electrostatic levitation furnace is improved by providing three pairs of electrodes opposed to each other respectively on three axes perpendicularly intercepting each other at a position where the sample is to be levitated in the vacuum chamber, and disposing a plurality of access ports, which are directed to the position of the sample, to the vacuum chamber tree-dimensionally, whereby the accessible direction against the sample is diversified, it becomes possible to improve the degree of freedom in distribution of various apparatuses and easily cope with increase of apparatuses.
Inventors:
Kazunori Kawasaki
Asahi Hiroaki
Shomura Matsumura
Tetsuya Takada
Asahi Hiroaki
Shomura Matsumura
Tetsuya Takada
Application Number:
JP2003532912A
Publication Date:
July 22, 2009
Filing Date:
September 27, 2002
Export Citation:
Assignee:
IHI Aerospace Co., Ltd.
International Classes:
F27B17/02; F27B17/00; F27D7/06; F27D11/00; F27D19/00; F27D21/02; H05B6/32; H05B7/00; H05B7/06; H05B7/101
Domestic Patent References:
| JP2002206865A | ||||
| JP11241888A | ||||
| JP11108562A | ||||
| JP8320182A | ||||
| JP7332868A | ||||
| JP3170791A | ||||
| JP2204199A | ||||
| JP2157592A | ||||
| JP2154979A | ||||
| JP2154978A |
Foreign References:
| US5015906 | ||||
| US4896849 | ||||
| US3965753 |
Attorney, Agent or Firm:
Janggi Motonori