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Title:
ELECTROSTATIC LEVITATION FURNACE AND SAMPLE FUSING METHOD USING THIS FURNACE
Document Type and Number:
Japanese Patent JP2004286298
Kind Code:
A
Abstract:

To allow fusion while maintaining the respective temperatures; and to realize the fusion in an external interference eliminated state by melting while individually levitating a sample regardless of whether or not the sample is a conductor.

This electrostatic levitation furnace has a vacuum chamber 2, main electrodes 3 opposed in the vacuum chamber 2, an auxiliary electrode 4 for moving the levitating sample S to a prescribed position P by an electric field between the main electrodes 3 and 3, and a laser irradiating part 5 for melting by irradiating to the sample S with a laser beam La. A electric field generating space A is formed between the adjacent main electrodes 3 and 3 by arranging a plurality of main electrodes 3 at a proper interval in the vertical direction. The auxiliary electrode 4 is arranged in response to the respective electric field generating spaces A. The laser irradiating parts 5 are arranged on both the upper end main electrode 3U side and the lower end main electrode 3L side, and are mutually coaxially opposed, and a through-hole 3a for passing the sample S is arranged in the center of the intermediate main electrode 3.


Inventors:
KAWASAKI KAZUNORI
ASAHI HIROAKI
Application Number:
JP2003078762A
Publication Date:
October 14, 2004
Filing Date:
March 20, 2003
Export Citation:
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Assignee:
IHI AEROSPACE CO LTD
International Classes:
F27B14/04; F27B17/00; F27D7/06; F27D21/02; (IPC1-7): F27B17/00; F27D7/06; F27D21/02
Attorney, Agent or Firm:
Janggi Motonori