To provide a small micro relay having good high frequency characteristic by providing fixed electrodes on both sides of a signal line with equal distance and sharing it with a high frequency GND electrode.
Fixed electrodes 12 and two signal lines 13, 14 are respectively provided on the upper surface of a glass board 10a, and the surfaces of the fixed electrodes 12 are coated with insulating films 16, and respectively connected with connection pads 12b1-12b4 through wirings 12a1-12a4. The fixed electrodes 12 are formed on both sides of the signal lines 13, 14 with equal distance, and are simultaneously used with a high frequency GND electrode. This structure allows a characteristic impedance to be determined from a ratio of a signal line width to a gap of the fixed electrodes (GND electrode) arranged on the same plane as these signal lines, and a dielectric constant of a fixed board. Thus, even when a high frequency characteristic is increased using an insulating board such for glass as the fixed board, its thickness and the signal line width can be restrained.
FURUMURA YOSHIYUKI