Title:
ELECTROSTATIC MICRO RELAY
Document Type and Number:
Japanese Patent JP3852224
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a small micro relay having good high frequency characteristic by providing fixed electrodes on both sides of a signal line with equal distance and sharing it with a high frequency GND electrode.
SOLUTION: Fixed electrodes 12 and two signal lines 13, 14 are respectively provided on the upper surface of a glass board 10a, and the surfaces of the fixed electrodes 12 are coated with insulating films 16, and respectively connected with connection pads 12b1-12b4 through wirings 12a1-12a4. The fixed electrodes 12 are formed on both sides of the signal lines 13, 14 with equal distance, and are simultaneously used with a high frequency GND electrode. This structure allows a characteristic impedance to be determined from a ratio of a signal line width to a gap of the fixed electrodes (GND electrode) arranged on the same plane as these signal lines, and a dielectric constant of a fixed board. Thus, even when a high frequency characteristic is increased using an insulating board such for glass as the fixed board, its thickness and the signal line width can be restrained.
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Inventors:
Minoru Sakata
Furumura Yoshiyuki
Furumura Yoshiyuki
Application Number:
JP28660298A
Publication Date:
November 29, 2006
Filing Date:
October 08, 1998
Export Citation:
Assignee:
OMRON Corporation
International Classes:
H01H59/00; B62D57/00; B81B5/00; (IPC1-7): H01H59/00; B62D57/00
Domestic Patent References:
| JP8213803A | ||||
| JP10162713A | ||||
| JP9017300A |
Foreign References:
| DE4205340C2 |
Attorney, Agent or Firm:
Aoyama Aoi
Yasumichi Furukawa
Atsushi Maeda
Takanobu Nakajima
Yasumichi Furukawa
Atsushi Maeda
Takanobu Nakajima
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