Title:
ELECTROSTATIC SERVO TYPE PHYSICAL AMOUNT DETECTOR
Document Type and Number:
Japanese Patent JP3804242
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electrostatic servo type physical amount detector of which permits high-sensitivity servo control.
SOLUTION: Carrier wave signals P1, P2 having different periods between a high level (Hi) and a low level (Lo) are applied to fixed electrodes 3, 4 respectively. In a first period while the transfer carrier signals P1, P2 change between the Hi and Lo, a switch S2 is closed and a switch S3 is opened. At this time, a C-V conversion circuit 21 outputs a voltage corresponding to a capacity change of a differential capacity of a movable electrode 2d and fixed electrodes 3, 4. In a second period following the first period (period of a difference of the Hi and Lo of the carrier wave signals P1, P2), the switch S2 is opened and switch S3 is closed, whereby a feedback voltage is output from a signal- processing circuit 22 processing the output voltage from the C-V conversion circuit 21. The feedback voltage is applied to the movable electrode 2d, thereby executing servo control to bring the movable electrode 2d to a predetermined position.
Inventors:
Nonoyama Hayashi
Shigenori Yamauchi
Shigenori Yamauchi
Application Number:
JP488798A
Publication Date:
August 02, 2006
Filing Date:
January 13, 1998
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01L13/06; G01P15/125; G01D5/24; (IPC1-7): G01L13/06; G01D5/24; G01P15/125
Domestic Patent References:
| JP4504003A | ||||
| JP8178955A | ||||
| JP2110383A |
Attorney, Agent or Firm:
Yoji Ito
Takahiro Miura
Takahiro Miura