Title:
PIEZO ACTUATOR
Document Type and Number:
Japanese Patent JP2017135974
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a compact pneumatic power device which combines a compact fluid controller and a compact valve unit to remedy a defect of a conventional technique.SOLUTION: A compact pneumatic power device includes a compact fluid controller and a compact valve unit. The compact fluid controller has layers of a gas introduction plate, a resonance piece, a piezo actuator and a gas collection plate with a first chamber formed in a gap between the resonance piece and the piezo actuator. When the piezo actuator is driven, gas is continuously introduced into the first chamber through the gas introduction plate and the resonance piece and continuously pushed out of the compact fluid controller with a pressure gradient flow passage formed in the first chamber. The compact valve unit has the layers of a valve piece and an exit plate. When the gas is introduced into the compact valve unit from the compact fluid controller, a valve hole of the valve piece is opened or closed in accordance with motion of the gas in a single flow direction to release or accumulate pressure.SELECTED DRAWING: Figure 1A
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Inventors:
CHIN SEISHIYOU
HUANG CHI-FENG
HAN YUNG-LUNG
LIAO JIA-YU
CHEN SHOU-HUNG
HUANG CHE-WEI
LIAO HUNG-HSIN
CHEN CHAO-CHIH
CHEN JHENG-WEI
CHANG YING-LUN
CHANG CHIA-HAO
LEE WEI-MING
HUANG CHI-FENG
HAN YUNG-LUNG
LIAO JIA-YU
CHEN SHOU-HUNG
HUANG CHE-WEI
LIAO HUNG-HSIN
CHEN CHAO-CHIH
CHEN JHENG-WEI
CHANG YING-LUN
CHANG CHIA-HAO
LEE WEI-MING
Application Number:
JP2017010036A
Publication Date:
August 03, 2017
Filing Date:
January 24, 2017
Export Citation:
Assignee:
MICROJET TECHNOLOGY CO LTD
International Classes:
H02N2/04; F04B45/047; H01L41/09; H01L41/187
Domestic Patent References:
| JPH07122966A | 1995-05-12 | |||
| JP2012151651A | 2012-08-09 | |||
| JP2013057247A | 2013-03-28 | |||
| JP2013245649A | 2013-12-09 |
Foreign References:
| US20140377099A1 | 2014-12-25 | |||
| CN104234986A | 2014-12-24 | |||
| WO2011145544A1 | 2011-11-24 |
Attorney, Agent or Firm:
Hitoshi Shinbo
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