Title:
Electrostrictive actuator
Document Type and Number:
Japanese Patent JP6258241
Kind Code:
B2
Abstract:
[Problem] To ensure both high displacement and long-term stability in a piezoelectric actuator comprising a ferroelectric member having the reverse polarity to the polarity of a drive waveform. [Solution] A piezoelectric actuator (1) comprising: a piezoelectric element (2) provided with a piezoelectric section (10) that has a ferroelectric member (11) with an asymmetrical bipolar P-E curve, a capacitor (20) that is connected in series to the piezoelectric section (10), and a resistor (30) that is connected in series to the capacitor (20) and is connected in parallel to the ferroelectric member (11); and a drive unit (3) that drives the piezoelectric element (2) by inputting a drive waveform Vd including a direct-current offset component having the reverse polarity to the polarity of the ferroelectric member (11). The value of the coercive electric field Ec1 having the larger absolute value among two coercive electric fields, the value of the coercive electric field Ec2 having the smaller absolute value thereamong, the capacitance Cs of the capacitor (20), the capacitance Cpz of the ferroelectric member (11), the combined resistance Rp of the resistor (30) and the resistance of the ferroelectric member (11), and the base angular frequency ω of the drive waveform satisfy formulae I-III.
Inventors:
Takayuki Naono
Application Number:
JP2015037568A
Publication Date:
January 10, 2018
Filing Date:
February 27, 2015
Export Citation:
Assignee:
FUJIFILM Corporation
International Classes:
H02N2/00; H01L41/04; H01L41/09; H01L41/316
Domestic Patent References:
| JP201460330A | ||||
| JP201178203A | ||||
| JP9182466A |
Attorney, Agent or Firm:
Patent Service Corporation Taiyo International Patent Office
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