Title:
ELEMENT-ANALYZING PLASMA TORCH, AND ANALYSIS DEVICE AND ANALYSIS METHOD USING IT
Document Type and Number:
Japanese Patent JP3794962
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an element-analyzing plasma torch capable of accurately carrying out element analysis by restraining elution of a component from a constituent member of the plasma torch having a triple-tube structure to reduce a background peak relative to an analyzing object element, and to provide an analysis device and an analysis method using the plasma torch.
SOLUTION: This element-analyzing plasma torch 10 has a triple-tube structure composed by concentrically disposing a sample introduction tube 11 for running a sample of an analyzing object toward its opening hole 13, an inside tube 21 for running a gas forming plasma toward an opening hole 23, and an outside tube 31 for running a cooling gas toward an opening hole 33. In the plasma torch, plasma can be formed on the sides of the respective opening holes, and coating films 27 and 37 are formed on partial surfaces of the inside tube and the outside tube in contact with plasma or in the vicinities thereof to restrain the elution of the component in the inside tube and the outside tube.
Inventors:
Kawashima Yasushi
Suzuki Cho
Suzuki Cho
Application Number:
JP2002022965A
Publication Date:
July 12, 2006
Filing Date:
January 31, 2002
Export Citation:
Assignee:
tdk Corporation
International Classes:
G01N21/73; G01N27/62; (IPC1-7): G01N21/73; G01N27/62
Domestic Patent References:
| JP10048137A | ||||
| JP11183388A | ||||
| JP8005555A | ||||
| JP63289798A | ||||
| JP62155357U | ||||
| JP58082656U | ||||
| JP2003232738A |
Attorney, Agent or Firm:
Keijiro Tamura
Kenichi Kobayashi
Kenichi Kobayashi
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