Title:
ELEMENT CHANGEOVER DEVICE, ILLUMINATION OPTICAL SYSTEM, ALIGNER, AND METHOD OF MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP2011060869
Kind Code:
A
Abstract:
To provide an element changeover device that positions one of a plurality of reflection optical elements into an optical path and can of easily exchange the respective reflection optical elements.
The element changeover device (30) for positioning one of the plurality of the reflection optical elements (31a, 31b, 31c, 31d) into the optical path includes: a body (30a) capable of detachably mounting the plurality of the reflection optical elements from a side opposite to the optical path side; and a drive section (30c) for driving the body to position one reflection optical element selected from the plurality of the reflection optical elements mounted to the body into the optical path.
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Inventors:
TANITSU OSAMU
Application Number:
JP2009206512A
Publication Date:
March 24, 2011
Filing Date:
September 08, 2009
Export Citation:
Assignee:
NIKON CORP
International Classes:
H01L21/027; G02B7/18; G02B7/182; G02B19/00; G03F7/20
Attorney, Agent or Firm:
Takao Yamaguchi