PURPOSE: To miniaturize the titled element so that the element can be enclosed directly even into a small objective space and to detect the deterioration of a vacuum degree in said space by forming said element from an insulator board, a pair of electrodes, a pair of lead wires provided to the counter electrodes and an oxide semiconductor layer formed with covering both of the surface of the board and the counter electrodes.
CONSTITUTION: The insulator board 1 is a carrier for the electrodes and the oxide semiconductor layer. A sintered body such as e.g. various ceramics can be exemplified as a material composing said board. A pair of electrodes 2, 2' are stuck on one surface of the board, and the lead wires 3, 3' are provided to the electrodes 2, 2' respectively. Both are served for measuring an electric resistance of the oxide semiconductor layer. The layer 4 of oxide semiconductor is formed in a state of covering both one surface of the board 1 and the electrodes 2, 2'. The electric resistance of the layer 4 can be measured through the electrodes 2, 2'. Either of n type and p type semiconductors are acceptable as the oxide semiconductor composing the layer 4.
TAKIGAWA OSAMU
SHIRATORI MASAYUKI
SAKAI TADASHI
