Title:
元素別X線蛍光顕微鏡および動作の方法
Document Type and Number:
Japanese Patent JP2005527833
Kind Code:
A
Abstract:
An element-specific imaging technique utilizes the element-specific fluorescence X-rays that are induced by primary ionizing radiation. The fluorescence X-rays from an element of interest are then preferentially imaged onto a detector using an optical train. The preferential imaging of the optical train is achieved using a chromatic lens in a suitably configured imaging system. A zone plate is an example of such a chromatic lens; its focal length is inversely proportional to the X-ray wavelength. Enhancement of preferential imaging of a given element in the test sample can be obtained if the zone plate lens itself is made of a compound containing substantially the same element. For example, when imaging copper using the Cu La spectral line, a copper zone plate lens is used. This enhances the preferential imaging of the zone plate lens because its diffraction efficiency (percent of incident energy diffracted into the focus) changes rapidly near an absorption line and can be made to peak at the X-ray fluorescence line of the element from which it is fabricated. In another embodiment, a spectral filter, such as a multilayer optic or crystal, is used in the optical train to achieve preferential imaging in a fluorescence microscope employing either a chromatic or an achromatic lens.
Inventors:
Yun Wembing
Nill, Kenneth W
Nill, Kenneth W
Application Number:
JP2004509399A
Publication Date:
September 15, 2005
Filing Date:
May 29, 2003
Export Citation:
Assignee:
XRADIA, INC.
International Classes:
G01N23/223; G01N23/225; G21K1/06; G21K3/00; G21K7/00; H01J37/12; H01J37/244; (IPC1-7): G01N23/223; G01N23/225; G21K1/06; G21K3/00; G21K7/00; H01J37/12; H01J37/244
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai